MDPI, 2019. – 144 p. – ISBN: 978-3-03897-627-1. Printed Edition of the Special Issue Published in Micromachines. Micro-resonators have reached a distinctive level of maturity due to the accumulated wealth of knowledge on their design, modeling, and manufacturing during the past few decades. Alongside this tremendous scientific progress, micro-resonators are now commonly found in...
2nd Edition. — Springer, 2008. — 260 p. — ISBN13: 978-0387095356; ISBN10: 0387095357. MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the...
Springer International Publishing Switzerland, 2016. – 181 p. – ISBN10: 3319277553. Presents guidelines to engineer functional properties of piezoelectric systems. Describes optimization processes to perform technological applications. Excellent thesis presented and defended at Technical University Darmstadt. This book addresses and analyzes the mechanisms responsible for...
Springer, 2010. — 447 p. — ISBN 978-0-387-09510-3. Введение в МЭМС: изготовление и применение Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques....
Artech House, 2010. — 213 p. Microelectromechanical systems (MEMS) are an emerging technology that has the potential for a multitude of uses. The sensors are low cost, low power consuming, and easily available. MEMS inertial sensors have introduced a new concept of affordability to inertial positioning and navigation, which have always been dedicated for special applications...
Springer, 2004. — 510 p. — ISBN: 978-3-642-05915-5. Direct Bonding, Fusion Bonding, Anodic Bonding, Wafer Bonding: A Historical Patent Picture of the Worldwide Moving Front of the State-of-the-Art of Contact Bonding Basics of Silicon-on-Insulator (SOI) Technology Silicon-on-insulator by the Smart Cut Process ELTRAN Technology Based on Wafer Bonding and Porous Silicon Wafer...
Berlin, Heidelberg: Springer, 2004. — 499 p., 372 fig., 25 tables. — (Springer Series in Materials Science, vol. 75). — ISBN10: 3540210490, ISBN13: 9783540210498. During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by...
Коллективная монография.
Лондон, The Institution of Engineering and Technology, 2008 г. - 940 с.
Серия: IET circuits, devices and systems series.
Том. 18.
Редакторы серии:
Dr R.S. Soin.
Dr D.G. Haigh.
Professor Y. Sun.
Рассматриваются вопросы разработки, создания и использования интегрированных систем типа "лаборатория на чипе".
Подробно рассматривается разработка систем...
CRC Press, Taylor & Francis Group, 2005. — 463 p. — ISBN: 0-8247-5824-2. Features Alerts the MEMS designer to relevant issues that can save time and money on a project; Provides a unified treatment of the course of action to be taken from a product development point of view; Guides the reader through the process in a logical, intuitive manner. It is challenging at best to find...
The Institution of Engineering and Technology, 2014. — 123 p. — ISBN: 978-1-84919-656-7. The unavoidable element in the development of flight control systems (to date) has been in hydraulic actuators. This has been the case primarily because of their proven reliability and the lack of alternative technologies. However, the technology to build electromechanically actuated...
Springer, 2016. — 194 p. — (Engineering Materials). — ISBN 978-3-319-35139-1. Aradhana Dutta, Bidyut Deka, Partha Pratim Sahu. This textbook is an outcome of doctoral research carried out in the development of optical sensing techniques using planar optical waveguide by Aradhana Dutta, at Tezpur Central University, Tezpur, Assam, India. Tremendous investigation expanded in the...
Wiley, 2016. — 352 p. — ISBN: 978-1-118-86924-6. Nanomagnetic and spintronic computing devices are strong contenders for future replacements of CMOS. This is an important and rapidly evolving area with the semiconductor industry investing significantly in the study of nanomagnetic phenomena and in developing strategies to pinpoint and regulate nanomagnetic reliably with a high...
384 p. 2010 Cambridge University Press, New York.
Computer architecture is at a turning point. Radical changes occurred in the 1980s when the Reduced Instruction Set Computer (RISC) philosophy, spurred in good part by academic research, permeated the industry as a reaction to the Complex Instruction Set Computer (CISC) complexities. Today, three decades later, we have reached a...
John Wiley & Sons, 2007. — 229 p. The concept of scaling is fundamental in engineering design. This book deals with the main issues in designing microelectromechanical systems (MEMS), taking into account the scaling item. This text includes a wide view of various types of MEMS. Moreover, the very important theme of energy supplies in MEMS has been accurately faced. Details of...
William Andrew, 2008. - 198 p. - This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for...
CRC Press, Taylor & Francis Group, 2015. — XII, 169 p. — ISBN13: 978-1-4822-5091-6 (eBook - PDF). The rapidly emerging fields of nanotechnology and nano-fabrication have enabled the creation of new sensors with dramatic improvements in sensitivity and range, along with substantial miniaturization. And, although there are many books on nanotechnology, recent advances in micro...
Artech House, 2009. — 545 p. — ISBN: 978-1-59693-246-3. Book Information Today's microchips have nearly reached their performance limits. Various heat removal, power delivery, chip reliability, and input/output (I/O) signaling problems stand in the way of next-generation 3D gigascale, system-on-a-chip technology, and this cutting-edge guide describes the latest breakthroughs in...
Elsevier / William Andrew, 2016. — 511 p. — (Micro and Nano Technologies Series). — ISBN: 978-0-323-35321-2. Three-Dimensional Microfabrication Using Two-Photon Polymerization (TPP) is the first comprehensive guide to TPP microfabrication—essential reading for researchers and engineers in areas where miniaturization of complex structures is key, such as in the optics,...
Proceedings of the NATO Advanced Study Institute on Optical Chemical Sensors (Erice, Italy, 29 July - 10 August 2004). — Springer, 2006. — 549 p. — ISBN-10 1-4020-4609-X. In the summer of 2004, the NATO A.S.I. on the subject Optical Chemical Sensors was organised in Erice, Sicily. This NATO A.S.I. was the 40th Course of the International School of Quantum Electronics, under the...
Springer, 2007. — 366 p. — ISBN: 978-3-540-32641-0. An important aim of the presented book is the explanation of the application of piezoelectric materials such as piezoceramics within the wide field of electromechanical actuators and sensor technology. The reader should be presented the physical and mechanical properties of piezoceramics in a distinct way. In a next step, the...
Wiley-VCH, 2005. — 595 p. The present volume of Advanced Micro & Nanosystems has been divided into eleven chapters, providing a broad overview on current and past activities in the area of CMOS-MEMS. To our best knowledge, it is the first book dedicated to CMOS-MEMS. It examines and illustrates the recent, significant advances in the field of CMOS-integrated...
Wiley, 2004. — 436 p. — ISBN: 3-527-30746-X, 978-3-527-30746-3. Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up...
Wiley-VCH, 2005. — 608 p. — ISBN: 3-527-31080-0. Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind...
CRC Press, 2006. — 352 p. — (Mechanical engineering). — ISBN: 978-0-8247-2305-7. MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new...
Amsterdam: Elsevier, 2000. — 390 p. Some years ago, silicon-based mechanical sensors, like pressure sensors, accelerometers and gyroscopes, started their successful advance. Every year, hundreds of millions of these devices are sold, mainly for medical and automotive applications. The airbag sensor on which research already started several decades ago at Stanford University can...
Elsevier, 2005. — 312 p. MEMS, the acronym of "Micro Electro Mechanical Systems", is generally considered as micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. As microelectronics is a well-developed technology, the research and development of MEMS is concentrated on the research and development of micro mechanical sensors and...
IEEE Press, 1997, 302 pages, ISBN 0-7803-1130-2 Capacitive sensors can solve many different types of sensing and measurement problems.They can be integrated into a printed circuit board or a microchipand offer noncontact sensing with nearly infinite resolution.They are used for rotary and linear position encoding, liquid level sensing, touch sensing, sensitive micrometers,...
Wiley, 2013. – 539 p. – ISBN: 978-3-527-64712-5. System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design...
Artech House, 2004, 281 p. Язык - английский. МЭМС механические датчики. Данная книга посвящена обзору микроэлектромеханических преобразователей (МЭМС) на основе кремния. В введении в МЭМС определены некоторые из обычно используемых терминов, а также обсуждены причины использования кремния как одного из ключевых материалов в миниатюрных механических преобразователях. Глава 2...
2nd Edition. — New York, USA, Taylor & Francis, Routledge, 2017. — 257 p. — ISBN: 1138654205. In this second edition of Material Strategies in Digital Fabrication are new case studies, improved wayfinding, the inclusion of composites and plastics, and references to similar strategies between different projects. In 400 step-by-step diagrams dissecting 39 case studies in 10...
Springer, 2019. — 273 p. — (Energy, Environment, and Sustainability). — ISBN: 978-981-13-3289-0. This volume covers the various sensors related to automotive and aerospace sectors, discussing their properties as well as how they are realized, calibrated and deployed. Written by experts in the field, it provides a ready reference to product developers, researchers and students...
Springer International Publishing, Switzerland, 2017. — 423 p. — (Microsystems and Nanosystems) — ISBN: 9783319286860 This book is meant to introduce piezoelectric microelectromechanical system (MEMS) resonators to a broad audience of engineers, graduate students, and researchers with the scope of offering a review of the field as well as generating excitement for future...
Springer, 2016. — 176 p. — ISBN10: 331927175X. This book describes the n and p-channel Silicon Nanowire Transistor (SNT) designs with single and dual-work functions, emphasizing low static and dynamic power consumption. The authors describe a process flow for fabrication and generate SPICE models for building various digital and analog circuits. These include an SRAM, a...
Springer, 2016. — 170 p. — ISBN10: 331927175X. This book describes the n and p-channel Silicon Nanowire Transistor (SNT) designs with single and dual-work functions, emphasizing low static and dynamic power consumption. The authors describe a process flow for fabrication and generate SPICE models for building various digital and analog circuits. These include an SRAM, a...
New York: Wiley-VCH, 2015. — 512 p. Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric,...
Springer, 2011. — 446 p. — ISBN: 978-3-642-12903-2. This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated...
Springer, 2014. – 283 p. – ISBN: 978-1-4020-9310-4, DOI: 10.1007/978-1-4020-9311-1. Piezoelectric materials (and pyroelectrics and ferroelectrics) are used by industry in a very large range of applications. These include ultrasonic detectors, cleaners, imaging systems and sonar devices; ink-jet printer heads, diesel and gasoline fuel injectors for automobiles, trucks and vans;...
2nd edition. — Oxford University Press, 2001. — 603 p. Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text...
Boca Raton: CRC Press, 2013. — 478 p. За последние десять лет в отрасли микроэлектромеханических систем (МЭМС) произошел бурный рост. Их применение варьируется от акселерометров и гироскопов, используемых в автомобильной безопасности до высокоточных встроенных генераторов на кристалле для эталонных генераторов и мобильных телефонов. Книга "МЭМС: Фундаментальные технологии и...
MDPI, 2019. – 219 p. – ISBN: 978-3-03921-543-0. Printed Edition of the Special Issue Published in Micromachines. The last two decades have witnessed a rapid development of microelectromechanical systems (MEMS) involving gas microflows in various technical fields. Gas microflows can, for example, be observed in micro heat exchangers designed for chemical applications or for cooling...
Artech House, 2013. — 191 p. — ISBN: 978-1-60807-527-0. Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS)...
Springer-Verlag, Berlin, 2007, 220 pages, ISBN: 3540496025 Solid-state systems are frequently classified according to their physical, structural or chemical properties. Such schemes are extremely helpful since properties related to any such classification are typically known and facilitate identifying solids with special material classes. The best-known examples of these...
CRC Press, 2005, 536 pages. Microelectronic Packaging analyzes the massive impact of electrochemical technologies on various levels of microelectronic packaging. Traditionally, interconnections within a chip were considered outside the realm of packaging technologies, but this book emphasizes the importance of chip wiring as a key aspect of microelectronic packaging, and...
Wiley-ISTE, 2009. — 212 p. This book provides the fundamentals and recent advances in nano and micromachining for modern manufacturing engineering. It begins by outlining nanomachining before discussing various advances in field and machining processes. The coverage concludes with an evaluation of subsurface damages in nano and micromachining and a presentation of applications...
Springer, 2005, 254 pages The field of Nanotechnology, which aims at exploiting advances in the fabrication and controlled manipulation of nanoscale objects, is attracting worldwide attention. This attention is predicated upon the fact that obtaining early supremacy in this field of miniaturization may well be the key to dominating the world economy of the 21st century, and...
Springer, 2009. — 185 p. — ISBN: 1441902546. На англ. языке. The book will integrate various nano technologies on materials, devices and systems and identify key areas and results. The book will describe different design aspects for integrated systems on silicon, as well as on heterogeneous platforms including, but not limited to, electrical, optical, micromechanical and...
ISTE / Wiley, 2011. — 412 p. — ISBN: 978-1-84821-239-8. This book contains all the necessary knowledge to enable a complete understanding of how piezoelectric and ferroelectric thin films work, providing the key to integrating them into Microsystems. Topics covered include: deposition methods, contamination, key processes, and characterization. The basic concepts are detailed...
Springer Science + Business Media, 2008, Pages: 421 This book investigates the development of networkable smart objects for Ambient Intelligence (AmI) with specific emphasis upon the implementation of the microsystems and nanoscale devices required to achieve effective smart systems. In this context, it seeks to investigate the challenges and potential solutions that will...
Wiley-Scrivener, 2014 — 509 p. — (Advanced materials series) — ISBN 978-1-118-77348-2,111-112-114-1 Presents a comprehensive and interdisciplinary review of the major cutting-edge technology research areas—especially those on new materials and methods as well as advanced structures and properties—for various sensor and detection devices The development of sensors and detectors...
Springer, 2020. – 191 p. – ISBN: 978-3-030-21496-8. This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms...
Springer New York Heidelberg Dordrecht London, 2013. XI, 245 p. 101 illus., 86 illus. in color. — ISBN: 978-1-4614-8516-2, ISBN: 978-1-4614-8517-9 (eBook), DOI 10.1007/978-1-4614-8517-9. Provides comprehensive design guidance on piezoresistance Includes an overview of applications requirements Codifies the design of piezoresistors in MEMS Case study approach includes the design...
MDPI, 2019. – 84 p. – ISBN: 978-3-03921-637-6. Printed Edition of the Special Issue Published in Micromachines. The development of solid state gas sensors based on microtransducers and nanostructured sensing materials is the key point in the design of new portable measurement systems with sensing and identification performances comparable with those of most sophisticated...
Springer, 2006. -349 p. (Springer Series in Advanced Microelectronics, vol. 24).
This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be...
Springer, 2009. - 614 p. - Silicon Devices and Process Integration covers state-of-the-art silicon devices, their characteristics, and their interactions with process parameters. It serves as a comprehensive guide which addresses both the theoretical and practical aspects of modern silicon devices and the relationship between their electrical properties and processing...
Springer, 2001. — 306 p. — ISBN: 978-3-642-08706-6. Fabrication technologies related to those which are exploited for the fabrication of integrated circuits can be used to machine mechanical structures with minimum feature sizes in the range of micrometers. The mechanical machining of silicon based on IC-technologies is known as micromachining, and the systems made by...
Wiley-VCH, 2021. — 503 p. — ISBN 978-3-527-34647-9. MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for...
Springer, 1997. — 417 p. — ISBN: 978-3-662-03450-7. Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a...
Wiley, 2014. — 384 p. This book focuses on the chemistry of inkjet printing inks, as well to special applications of these materials. As is well-documented, this issue has literallyexploded in the literature in particular in the patent literature. After an introductory section to the general aspects of the field, the types and uses of inkjet printing inks are summarized...
Springer, 2015. — 758 p. This book presents a comprehensive and up-to-date account of the theory (physical principles), design, and practical implementations of various sensors for scientific, industrial and consumer applications. This latest edition focuses on the sensing technologies driven by the expanding use of sensors in mobile devices. These new miniature sensors will be...
Springer, 2010. — 678 p. The Handbook's coverage of sensors is extensive, ranging from simple photodiodes to complex devices containing components in combination. It offers hard-to-find reference data on the properties of numerous materials and sensing elements and emphasizes devices that are less well-known, whose technology is still being refined, and whose use permits the...
Springer, 2010. — 678 p. The Handbook's coverage of sensors is extensive, ranging from simple photodiodes to complex devices containing components in combination. It offers hard-to-find reference data on the properties of numerous materials and sensing elements and emphasizes devices that are less well-known, whose technology is still being refined, and whose use permits the...
CRC Press, 2014. — 631 p. — ISBN: 978-1-4665-6067-3. Microsystems technologies have found their way into an impressive variety of applications, from mobile phones, computers, and displays to smart grids, electric cars, and space shuttles. This multidisciplinary field of research extends the current capabilities of standard integrated circuits in terms of materials and designs...
2nd Edition. — Artech House Inc, Boston, London, 2000. — 411p. — ISBN1-58053-398-1. Semiconductor sensors initially were developed to provide easier-tointerface, lower-cost, and more reliable inputs to electronic control systems. The microcontrollers at the heart of these systems have increased in complexity and capability while drastically achieving reduced cost per function....
Springer, 2003. — 218 p. — ISBN: 978-3-642-55503-9. This book addresses the use of MEMS and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology. Such micromachined tools for nanotechnology can enhance the sensitivity, spatial resolution, dexterity, selectivity, and parallel processing capability in measuring and manipulating...
2nd edition. — CRC Press; Taylor & Francis Group, 2006. — 547 p. The 3rd volume of 3 volume set: The MEMS Handbook, Gad-el-Hak, Mohammed (Ed). As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused,...
2nd edition. — CRC Press, Taylor & Francis Group, 2006. — 647 p. As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they...
Second edition. — CRC Press, 2006. — 488 p. — (Mechanical engineering series). — ISBN 978-0-8493-9137-8. As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they...
CRC Press, 2002. — 1332 p. The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their...
Hoboken, USA: JohnWiley & Sons, Inc., 2018. — 339 p. — ISBN: 0471411396. Comprehensive look at mechanical molecular devices that mimic the behavior of man-made devices Molecular devices and molecular machines are individual molecules and molecular systems capable of providing valuable device-like functions. Many of them have distinct conventional prototypes and therefore can be...
Wiley, 2001. — 515 p. — ISBN: 0-471- 86109-X. Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and...
John Wiley & Sons, Inc., 2017. — 365 p. This book details flexible glass properties that enable use in emerging electronic and opto-electronic applications. Discussion includes flexible glass advantages compared to alternative substrate materials. Examples describe flexible glass in processes such as vacuum deposition, monolithic integration, printing, and roll-to-roll....
Springer, 2009. — 279 p. Hydrogels are a fascinating class of polymers which show an immense ability of swelling under the influence of temperature, pH value or concentrations of different species in aqueous solutions. The volume change can amount up to several hundred percent. This unique behaviour is already used in such applications like disposable diapers, contact lenses or...
Springer, 2011. 1185 p. ISBN: 0387473165 MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material...
Springer New Delhi Heidelberg New York Dordrecht London, 2015. XV, 161 p. 164 illus. — ISBN: 978-81-322-2143-2, ISBN: 978-81-322-2144-9 (eBook) — (Mechanisms and Machine Science, Vol. 28). Fills up the persisting gap in the published literature on the mechanical manipulative aspects of Micromechanisms Presents an overview of miniaturization and scaling laws, basic design...
Wiley-IEEE Press, 2025. — 190 p. Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices. Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved...
Wiley-IEEE Press, 2025. — 208 p. — ISBN-13: 978-1394229833. Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and...
Wiley-IEEE Press, 2025. — 208 p. — ISBN-13: 978-1394229833. Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and...
Wiley-IEEE Press, 2025. — 208 p. — ISBN-13: 978-1394229833. Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and...
ISTE Press - Elsevier, 2018. — 273 p. — ISBN: 978-1-78548-282-3. This book concentrates on the modeling of diffusion processes and the behavior of modern integrated components, from material, to architecture. It goes through the process, the device and the circuit regarding today's widely discussed nano-electronics, both from an industry perspective and that of public entities....
Springer, 2007. — 131 p. — ISBN: 978-3-540-69561-5. This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and...
Springer, 2017. — 574 p. — ISBN: 978-3-319-34070-8. This book gathers, for the first time, an overview of nearly all of the magnetic sensors that exist today. The book is offering the readers a thorough and comprehensive knowledge from basics to state-of-the-art and is therefore suitable for both beginners and experts. From the more common and popular AMR magnetometers and up...
John Wiley & Sons, Inc. Hoboken, New Jersey, and Scrivener Publishing LLC, Salem, Massachusetts, 2014. — 427 p. — ISBN: 978-1-118-42379-0 This book facilitates the access to the various disciplines, highlighting their many points of contacts and making the clear the message that membrane-based sensors represent the future of the research in every field, including chemistry,...
200 p. 2018 Springer International Publishing AG Micro-manufacturing and precision manufacturing entail the use of sophisticated techniques in order to attain special manufacturing requirements, such as precision machining and finishing of various DTM, bio and smart materials; micro-manufacturing of mechanical components; machining of intricate shapes and features; and precision...
Springer Science + Business Media, 2010, Pages: 314 The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of successful applications, sensors, materials and processing aspects. The authors who have contributed to the book...
The Institution of Engineering and Technology, 2016. — 465 p. — ISBN: 978-1-84919-931-5. The subject of nano-scaled semiconductor devices and technology is a strategic and emerging area of relevant societal importance in our ubiquitous electronics era. This book is intended for scientists, engineers, and graduate students involved in the research, technology development,...
Springer, 2011. 304 p. ISBN-10:1441960171 The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the...
Willey, 2020. — 238 p. — ISBN: 9781119552178. An important guide that reviews the basics of magnetic biosensor modeling and simulation. Magnetic Sensors for Biomedical Applications offers a comprehensive review of magnetic biosensor modelling and simulation. The authors – noted experts on the topic – explore the models strengths and weaknesses and discuss the competencies of...
AIAA, Virginia, 1999. — 709 p. — ISBN 1-884989-03-9. Collects many of the ideas, fundamental principles, and technology rudiments that can profoundly change the manner by which aerospace systems are designed, engineered, and assembled. The concepts presented advance the use of microengineering principles to impart intelligence, volition, and motility to systems on the miniature...
Springer, 2005. — 236 p. — ISBN: 3-540-23782-8. This book provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it...
Wiley, 2008. – 374 p. – ISBN: 978-3-527-31720-2. This handy reference and textbook examines the topic of nanosystem design in further detail. It explains the physical and chemical basics behind the design and fabrication of nanodevices, covering all important, recent advances in the field, while introducing nanosystems to less experienced readers. Information and communication...
Springer Berlin Heidelberg, 2004. — 138 p. — ISBN: 978-3-642-05999-5. Experimental comparison of DNA libraries using microelectronic arrays Interlayer Exchange Coupling of Ferromagnetic Films Across Semiconducting Interlayers Magnetostrictive LC-circuits as mechanical sensors Chemical Nanolithography: Patterning and Chemical Functionalization of Molecular Monolayers Modeling,...
CRC Press, 2016. — 450 p. This book introduces various advanced, smart materials and the strategies for the design and preparation for novel uses from macro to micro or from biological, inorganic, organic to composite materials. Selecting the best material is a challenging task, requiring tradeoffs between material properties and designing functional smart materials. The...
New York: Springer, 2018. — 1479 p. — (Micro/Nano Technologies). — ISBN: 978-981-10-5945-2. This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to...
MDPI, 2018. – 215 p. – ISBN: 978-3-03842-868-8. Printed Edition of the Special Issue Published in Micromachines. MEMS mirrors can steer, modulate, and switch light, as well as control the wavefront for focusing or phase modulation. MEMS mirrors have found enormous commercial success in projectors, displays, and fiberoptic communications. Micro-spectrometers based on MEMS mirrors...
Wiley, 2012. — 392 p. Whilst inkjet technology is well-established on home and small office desktops and is now having increasing impact in commercial printing, it can also be used to deposit materials other than ink as individual droplets at a microscopic scale. This allows metals, ceramics, polymers and biological materials (including living cells) to be patterned on to...
Wiley, 2013. — 357 p. — ISBN: 978-3-527-67392-6. Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the...
CRC Press, 2012. — 740 p. — ISBN: 978-1439836200. As rapid technological developments occur in electronics, photonics, mechanics, chemistry, and biology, the demand for portable, lightweight integrated microsystems is relentless. These devices are getting exponentially smaller, increasingly used in everything from video games, hearing aids, and pacemakers to more intricate...
InTech, 2012. — 480 p. — ISBN: 978-953-51-0306-6. The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these...
Springer, 2006. - 341 p. - Radio Design in Nanometer Technologies is the first volume that looks at the integrated radio design problem as a "piece of a big puzzle", namely the entire chipset or single chip that builds an entire wireless system. This is the only way to successfully design radios to meet the stringent demands of today’s increasingly complex wireless systems.
William Andrew, 2015. — 444 p. Printing on Polymers: Fundamentals and Applications is the first authoritative reference covering the most important developments in the field of printing on polymers, their composites, nanocomposites, and gels. The book examines the current state-of-the-art and new challenges in the formulation of inks, surface activation of polymer surfaces, and...
Springer Science+Business Media,, 2007, 701 pages Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabrication techniques and addresses the...
Springer, 2018. — 566 p. This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials,...
2nd ed. Springer. 2009. 389 p. When first published in 1989 this was the leading book on chemical sensors. Since then, many undergraduate textbooks on chemical sensors have been published, but no graduate ones. This book is the first advanced undergraduate/graduate textbook on chemical sensors, and as with the first edition it will also garner strong interest as a reference...
Springer, 2004. — 354 p. — ISBN 978-3-642-08266-5. This book is probably the first comprehensive work for experts about actuators. Authored by a team of acknowledged experts, this book presents a multidisciplinary view of the state of the art in the field of actuators. The goal of the book is to provide a comprehensive overview of the properties, applications, and potential...
CRC Press, 2008. — 429 p. — ISBN: 978-0-8493-8069-3. The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease,...
The Institution of Engineering and Technology, 2016. — 465 p. Optical MEMS, or MOEMS, are MEMS (micro-electromechanical systems) merged with micro-optics. They allow sensing or manipulating optical signals on a very small size scale, using integrated mechanical, optical, and electrical systems, and encompass a wide variety of devices including optical switch, optical...
Wiley-VCH, 2020. — 436 p. — (Nanoscience and Technology). — ISBN: 978-3-527-34533-5. The book focuses on microfluidics with applications in nanotechnology. The first part summarizes the recent advances and achievements in the field of microfluidic technology, with emphasize on the the influence of nanotechnology. The second part introduces various applications of microfluidics...
Academic Press, 2017. — 458 p. — ISBN: 978-0-12-811212-0. This book addresses all aspects of micromanufacturing technology, presenting detailed technical information and the latest research developments. The book covers fundamentals, theory, simulation models, equipment and tools design, practical micromanufacturing procedures, and micromanufacturing-related supporting systems,...
Science Press / CRC Press, 2011. — 228 p. — ISBN: 978-1-4398-6597-2. The multi-billion-dollar microsystem packaging business continues to play an increasingly important technical role in today’s information industry. The packaging process—including design and manufacturing technologies—is the technical foundation upon which function chips are updated for use in application...
Springer International Publishing, Switzerland, 2015. – 398 p. – ISBN: 3319078356 This book describes the physics of the second-generation quartz crystal microbalance (QCM), a fundamental method of analysis for soft matter at interfaces. From a device for measuring film thickness in vacuum, the quartz crystal microbalance (QCM) has in the past two decades evolved into a...
582 p., Cambridge University Press 2013.
Offering a consistent, systematic approach to capacitive, piezoelectric, and magnetic MEMS, this textbook equips students to design and develop practical, system-level MEMS models. Includes a concise yet thorough treatment of the underlying principles of electromechanical transduction. Makes extensive use of easy-to-interpret electrical...
Singapore : World Scientific, 2014. — 266 c.
Demands for high-performance micro/nano manipulations, from the manufacture of microelectronic and photonic devices, biomedical apparatus, nanoscience and nanotechnology, renewable energy, environment protection, and high-end appliances, have been rapidly increasing in recent years. However, there are very few books on ultrasonic...
Final Report. — Fort Collins, Colorado: Department of Physics Colorado State University, 1981. — 92 p. The design of broad-beam industrial ion sources is described. The approach used emphasizes refractory metal cathodes and permanent-magnet multipole discharge chambers. Design procedures and sample calculations are given for the discharge chamber, ion optics, cathodes, and...
Cambridge University Press, 2011 - 475 p. - A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed...
CRC Press, 2018. — 324 p. — ISBN: 978-1-4987-5769-0. In Light Driven Micromachines, the fundamental principles and unique characteristics of light driven material structures, simple mechanisms and integrated machines are explored. Very small light driven systems provide a number of interesting features and unique design opportunities because streams of photons deliver energy...
Wiley, 2006. – 517 p. – ISBN: 978-3-527-31246-7. This edition of Micro Process Engineering was originally published in the successful series Advanced Micro & Nanosystems. Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a...
Springer, 2004. — 265 p. — ISBN: 978-3-662-09875-2. Since the beginning of the nineties, shape memory alloys (SMA) have become available for microsystems technology. Currently the breadth of research and development activities on SMA microactuators ranges from pure scientific topics of materials research to technological problems, such as micromachining, integration and...
Wiley-VCH, Weinheim, 1999, 368 pages. Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise...
MDPI, 2019. – 242 p. – ISBN: 978-3-03921-635-2. Printed Edition of the Special Issue Published in Micromachines. MEMS sensors are currently undergoing a phase of exciting technological development, not only enabling advancements in traditional applications such as accelerometers and gyroscopes, but also in emerging applications such as microfluidics, thermoelectromechanical, and...
William Andrew Publishing, 2006, 992 p. Язык - английский. МЭМС: Практическое руководство для конструирования, анализа и применения. Данное практическое руководство, написанное коллективом авторитетных специалистов и экспертов под ред. профессоров Яна Корвика и Оливера Пауля из Фрайбургского университета (Германия) призвано обеспечить доступ к всеобъемлющим ресурсам по МЭМС...
Wiley, 2012. — 450 p. Inkjet-based Micromanufacturing Inkjet technology goes way beyond putting ink on paper: it enables simpler, faster and more reliable manufacturing processes in the fields of micro- and nanotechnology. Modern inkjet heads are per se precision instruments that deposit droplets of fluids on a variety of surfaces in programmable, repeating patterns, allowing,...
Springer, 2009. — 350 p. Recent developments in the technology of silicon nanocrystals and silicon nanostructures, where quantum-size effects are important, are systematically described including examples of device applications. Due to the strong quantum confinement effect, the material properties are freed from the usual indirect- or direct-bandgap regime, and the optical,...
Springer, 2017. — 118 p. — ISBN: 978-3-319-47500-4. Kottapalli A.G.P., Asadnia M., Miao J., Triantafyllou M.S. Biological sensors found in nature have been optimized through evolution but have features that are not well understood yet. Knowledge obtained from natural systems could significantly benefit the engineering of artificial devices. Bio-inspired studies try to look outside...
WCB/McGraw-Hill, 1998. — xx, 911. — (McGraw-Hill Series in Electrical and Computer Engineering). — ISBN: 978-0072907223. Designed for a graduate-level course in micromachined devices, or as an introduction to the field for practicing engineers, this book presents an overview of the field, beginning with-micromachining approaches and including all major categories of...
Woodhead Publishing Limited, 2013. 355 p. — ISBN: 978-0-85709-118-5, ISBN: 978-0-85709-648-7. Micro Electro Mechanical Systems (MEMS) are miniature devices or machines which integrate elements such as actuators, sensors and a processor to form microsystems. The automotive sector is currently the biggest consumer of MEMS and this market, driven by safety legislation, is expected...
Cambridge University Press, 2011. - 178 Pages. На англ. языке. Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for...
Dordrecht: Springer. – 2006. – 290 p. While in some applications such as gas-flow sensors, the co-integration of a sensor with its surrounding electronics on a single chip is just an asset, co-integration is inescapable in other cases such as transistors-based pressure sensors or low-loss microwave circuits insulated from the substrate, on a membrane. Moreover, co-integration...
Springer, 2007. — 266 p. — ISBN: 978-0-387-71089-1. Capillary Forces in Microassembly discusses the use of capillary forces as a gripping principle in microscale assembly. Clearly written and well-organized, this text brings together physical concepts at the microscale with practical applications in micromanipulation. Throughout this work, the reader will find a review of the...
Springer, 2013. — 337 p. — ISBN: 978-3-642-37552-1. This book describes how surface tension effects can be used by engineers to provide mechanical functions in miniaturized products (<1 mm). Even if precursors of this field such as Jurin or Laplace already date back to the 18th century, describing surface tension effects from a mechanical perspective is very recent. The...
Springer Science+Business Media, LLC, 2010, XIV, 454p. 604 illus., 302 illus. in color. — ISBN: 978-0-387-77746-7, e-ISBN: 978-0-387-77747-4, DOI 10.1007/978-0-387-77747-4. Describes how turbine generators, motor compressors, rocket motors and combustors have been used as energy sources at the MEMS scale. Discusses in great detail how to model and manage systems-level...
2nd edition. — River Publishers, 2021. — 246 p. — (River Publishers Series in Electronic Materials and Devices). — ISBN 9788770226066. Sensors and measurement systems is an introduction to microsensors for engineering students in the final undergraduate or early graduate level, technicians who wants to know more about the systems they are using, and anybody curious enough to...
Springer, 2002. — 148 p. — ISBN: 978-3-642-07728-9. This book is intended for scientists and engineers in the field of micro- and nano-electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for...
Springer, 2023. — XXII, 525 p. : ill. — ISBN 978-981-19-9917-8. The book focuses on the design, materials, process, fabrication, and reliability of chiplet design and heterogeneous integraton packaging. Both principles and engineering practice have been addressed, with more weight placed on engineering practice. This is achieved by providing in-depth study on a number of major...
John H. Lau, Cheng Kuo Lee, C. S. Premachandran, Yu Aibin. — McGraw-Hill Education, 2009. — 400 p. — ISBN: 978-0-07-162792-4. A comprehensive guide to 3D MEMS packaging methods and solutions Written by experts in the field, Advanced MEMS Packaging serves as a valuable reference for those faced with the challenges created by the ever-increasing interest in MEMS devices and...
John Wiley & Sons, 2011. — 680 p. — ISBN: 978-0-470-46634-6. Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems,...
Springer, 2011. — 490 p. — ISBN: 978-3-642-10806-8. Electromechanical systems consisting of electrical, mechanical and acoustic subsystems are of special importance in various technical fields, e.g. precision device engineering, sensor and actuator technology, electroacoustics and medical engineering. Based on a circuit-oriented representation, providing readers with a...
Cambridge University Press, 296 p., 2010, ISBN13: 978-0-511-69143-0. Explore the frontier of device engineering by applying optimization to nanoscience and device design. This cutting-edge work shows how robust, manufacturable designs that meet previously unobtainable system specifications can be created using a combination of modern computer power, adaptive algorithms, and...
Springer, 2015. — 177 p. — ISBN: 978-3-319-08078-9. Piezoelectric (PE) accelerometers with integral electronics, also called Integrated Electronics Piezoelectric (IEPE) accelerometers, are vibration sensors designed for measurement of dynamic vibration signals at frequencies ranging from very low (near-dc) to 10 kHz. Their advantages include low noise; wide dynamic, frequency,...
Springer, 2005. — 231 p. — ISBN: 978-3-540-22680-2. As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron...
2nd Edition. — Springer, 2021. — 629 p. — (Springer Series in Advanced Microelectronics 64). — ISBN 9811570892. This book offers a comprehensive reference guide for graduate students and professionals in both academia and industry, covering the fundamentals, architecture, processing details, and applications of 3D microelectronic packaging. Introduction to 3D Microelectronic...
Springer International Publishing, Switzerland, 2017. — 465 p. — (Springer Series in Advanced Microelectronics 57) — ISBN: 3319445847. This volume provides a comprehensive reference for graduate students and professionals in both academia and industry on the fundamentals, processing details, and applications of 3D microelectronic packaging, an industry trend for future...
MDPI, 2019. – 173 p. – ISBN: 978-3-03921-825-7. Printed Edition of the Special Issue Published in Micromachines. The development of microdevices for blood analysis is an interdisciplinary subject that demands an integration of several research fields such as biotechnology, medicine, chemistry, informatics, optics, electronics, mechanics, and micro/nanotechnologies. Over the last...
William Andrew: Elsevier, 2010. — xxxii, 636 p. — (Micro & Nano Technologies). Series Editor - J. Ramsden. Overview: Impact of Silicon MEMS—30 Years After Silicon as MEMS Material Modeling in MEMS Measuring MEMS Micromachining Technologies in MEMS Encapsulation of MEMS Components Appendices: Common Abbreviations and Acronyms Nanoindentation Characterization of Silicon and other...
Springer, 2010. — 276 p. — ISBN: 978-0-387-46262-2. Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in...
Second Edition. Pearson, Prentice Hall, 2012. – 578 p. – ISBN: 978-0-13-249736-7. For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses...
Kluwer Academic Publishers, 2005. — xi, 405 p. — ISBN: 978-0-387-23037-5. This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in...
Kluwer Academic Publishers, 2005. — xi, 405 p. — ISBN: 978-0-387-23037-5. This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in...
Wiley, 2005. – 296 p. – ISBN: 978-3-527-31493-5. Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind...
2nd Edition. — CRC Press, 2002. —749 p. — ISBN: 0-8493-0826-7. MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly...
World Scientific Publishing Company, 2009. — 345 p. Modern printing is based on digitizing information and then representing it on a substrate, such as paper, pixel by pixel. One of the most common methods of digital printing is through inkjet printers. The process of inkjet printing is very complicated, and the ink used must meet certain chemical and physicochemical...
Stuttgart: Snaker, 2019. — 164 p. Ultra-thin chips combine flexibility and mechanical stability of silicon (20 μm thick) and maturity of CMOS technology. However, circuit design on bendable dies brings up new challenges that are not typically present in rigid electronics. Due to bending, variable stress emerges in silicon, changing the mobility of carriers, which may lead to...
Malcovati P. , Baschirotto A. , D’Amico A. , Natale C. (Eds. ) Springer, 2009. 444 p. ISBN-10:9048136059 Sensors and Microsystems contains a selection of papers presented at the 14th Italian conference on sensors and microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of...
Second Edition. — Artech House, 2004. — 304 p. — (Microelectromechanical Systems Series). — ISBN: 1-58053-590-9. MEMS (microelectromechanical systems) technology makes possible the production of miniature devices and systems that stand to revolutionize industrial, optical, medical and electronic markets. Thousands of practitioners and students have gained a solid understanding...
The McGraw-Hill Publishing Companies, Inc., 2006. — 432 p. The Evolution of the Microprocessor: Describes the development of the microprocessor and how transistor scaling has driven its evolution. Computer Components: Discusses computer components besides the microprocessor and the buses through which they interact with the processor. Design Planning: Explains the overall steps...
Apress, 2013 - 336p. - ISBN13: 978-1-4302-6013-4
На англ. языке
Sensor Technologies: Healthcare, Wellness and Environmental Applications explores the key aspects of sensor technologies, covering wired, wireless, and discrete sensors for the specific application domains of healthcare, wellness and environmental sensing. It discusses the social, regulatory, and design...
Wiley, 2008 - 404 p. Smart Sensor Systems discusses all of the important aspects of sensor systems, measurement techniques, microcontrollers, and testing and identification. Written with an applications focus, the book presents a number of case studies by renowned experts in the field. These case studies, along with a set of problems at the end of each chapter, enhance the...
Oxide Thin Films, Multilayers, and Nanocomposites.
by Paolo Mele (Editor), Tamio Endo (Editor), Shunichi Arisawa (Editor), Chaoyang Li (Editor), Tetsuo Tsuchiya (Editor).
File Size: 11191 KB.
Print Length: 316 pages.
Publisher: Springer; 2015 edition (March 26, 2015).
Publication Date: March 26, 2015.
ASIN: B00V9NWUMI.
This book provides a comprehensive overview of the...
AIAA, Virginia, 2000. — 496 p. — ISBN 1-56347-448-4. Micropropulsion is an enabling technology for microspacecraft operations by making missions possible that otherwise could not be performed. For example, the formation and maintenance of platoons of microspacecraft will require a maneuvering capability to counter orbital perturbations. Microspacecraft missions involving large...
Scribner, 2022. — 651 p. — ISBN 978-1-9821-7200-8. Power in the modern world - military, economic, geopolitical - is built on a foundation of computer chips. America has maintained its lead as a superpower because it has dominated advances in computer chips and all the technology that chips have enabled. (Virtually everything runs on chips: cars, phones, the stock market, even...
Scribner, 2022. — 1133 p. — ISBN 978-1-9821-7200-8 Power in the modern world - military, economic, geopolitical - is built on a foundation of computer chips. America has maintained its lead as a superpower because it has dominated advances in computer chips and all the technology that chips have enabled. (Virtually everything runs on chips: cars, phones, the stock market, even...
Simon & Schuster Ltd., 2022. — 464 p. — ISBN-13: 978-1398504097. ***Winner of the 2022 Financial Times Business Book of the Year Award*** ‘Pulse quickening. A nonfiction thriller – equal parts The China Syndrome and Mission Impossible‘ New York Times An epic account of the decades-long battle to control the world’s most critical resource—microchip technology Power in the modern...
Simon & Schuster Ltd., 2022. — 464 p. — ISBN-13: 978-1398504097. ***Winner of the 2022 Financial Times Business Book of the Year Award*** ‘Pulse quickening. A nonfiction thriller – equal parts The China Syndrome and Mission Impossible‘ New York Times An epic account of the decades-long battle to control the world’s most critical resource—microchip technology Power in the modern...
Simon & Schuster Ltd., 2022. — 464 p. — ISBN-13: 978-1398504097. ***Winner of the 2022 Financial Times Business Book of the Year Award*** ‘Pulse quickening. A nonfiction thriller – equal parts The China Syndrome and Mission Impossible‘ New York Times An epic account of the decades-long battle to control the world’s most critical resource—microchip technology Power in the modern...
Springer, 2003. — 275 p. — ISBN: 978-3-662-08792-3. This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented,...
Springer, 1999. — 442 p. — ISBN: 978-3-7091-6428-0. Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however,...
Springer, 2025. — 554 p. — ISBN-13 978-3031833571 This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable...
2nd Edition. — Woodhead Publishing, 2018. — 589 p. — (Woodhead Publishing Series in Electronic and Optical Materials). — ISBN: 978-0-08-102055-5. This book, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors,...
Wiley, 2003. 179 p. ISBN 0471233269 Society and industry worldwide continue to increase their reliance on the availability of accurate and current measurement information. Timely access to this information is critical to effectively meet the indication and control requirements of industrial processes, manufacturing equipment, household appliances, onboard automotive systems,...
CRC Press, Taylor & Francis Group, 2006. VIII, 367 p. — ISBN: 0-8247-2637-5. Features . Provides the first reference dedicated to employing MEMS in aerospace applications. Presents demonstrations of MEMS in past and current applications while looking ahead to future applications. Reviews the physical phenomena that dominate at the small scale along with micromachining and...
Springer Dordrecht Heidelberg London New York, 2011, VIII, 214 p. — ISBN: 978-90-481-9700-2, e-ISBN: 978-90-481-9701-9, DOI 10.1007/978-90-481-9701-9 — (Intelligent Systems, Control and Automation: Science and Engineering, Vol. 44). State-of-the-art science Applicable to modern technology Fast developing field In recent years microelectromechanical systems (MEMS) have emerged...
CRC Press, 2007. — 514 p. — ISBN: 978-0-8493-3682-9. Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology...
2nd edition. — CRC Press, 2020. — 585 p. — ISBN 978-1-4987-7947-0. Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of...
MDPI, 2019. – 376 p. – ISBN: 978-3-03921-320-7. Printed Edition of the Special Issue Published in Micromachines. Neural electrodes enable the recording and stimulation of bioelectrical activity from the nervous system. This technology provides neuroscientists and clinicians with the means to probe the functionality of neural circuitry in health and modulate activity in disease...
Springer Science & Business Media, 2015. – 721 p. Digital Imaging targets anyone with an interest in digital imaging, professional or private, who uses even quite modest equipment such as a PC, digital camera and scanner, a graphics editor such as PAINT, and an inkjet printer. Uniquely, it is intended to fill the gap between the highly technical texts for academics (with access...
UK: IET (The Institution of Engineering and Technology), 2020. — 439 p. — (Materials, Circuits and Devices). — ISBN 978-1-78561-897-0. The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need...
UK: IET (The Institution of Engineering and Technology), 2020. — 439 p. — (Materials, Circuits and Devices). — ISBN 978-1-78561-897-0. The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need...
Chapman & Hall/CRC, 2003. — 351 p. Modeling MEMS and NEMS is about the construction, analysis, and interpretation of mathematical models of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). The study of these models is intended to illuminate microscale and nanoscale phenomena and to aid in the design and optimization of MEMS and NEMS devices. MEMS...
Springer, 2017. — 154 p. — ISBN: 978-3-319-55544-7. This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline SiC, along with the...
2nd ed. — Elsevier, 2015. — 858 p. — ISBN: 0323311490, 9780323311496 Micromanufacturing Engineering and Technology, Second Edition, covers the major topics of micro-manufacturing. The book not only covers theory and manufacturing processes, but it uniquely focuses on a broader range of practical aspects of micro-manufacturing engineering and utilization by also covering...
William Andrew, Elsevier, 2010, 414 pages. This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development),...
Wiley-VCH, 2012. - 425 p. The focus behind this book on wafer bonding is the fast paced changes in the research and development in three-dimensional (3D) integration, temporary bonding and micro-electro-mechanical systems (MEMS) with new functional layers. Written by authors and edited by a team from microsystems companies and industry-near research organizations, this handbook...
MDPI, 2019. – 281 p. – ISBN: 978-3-03897-619-6. Printed Edition of the Special Issue Published in Micromachines. Glass has been part of the development of microtechnologies since the very beginning; even in microelectronics, glass films are useful to protect the underlying silicon substrate and conductive paths in semiconductors and help with device planarization. Glass ceramics...
ISTE, 2007. - 536 pages
Subjects covered:
Pressure Sensors
Optical Sensors
Flow Sensors
Intelligent Sensors and Sensor Networks
Accelerometers and Inclinometers
Chemical Sensors and Biosensors
Level, Position and Distance
Temperature Sensors
Solid State Gyroscopes and Navigation
Magnetic Sensors
New Technologies and Materials
Springer, 2014. — 208 p. — ISBN: 978-94-007-6799-7. Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead to more compact MEMS with...
Springer, 2019. — 566 p. — (Topics in Mining, Metallurgy and Materials Engineering). — ISBN: 978-3-662-57532-1. This book introduces physical effects and fundamentals of piezoelectric sensors and actuators. It gives a comprehensive overview of piezoelectric materials such as quartz crystals and polycrystalline ceramic materials. Different modeling approaches and methods to...
Wiley, 2009. – 485 p. – ISBN: 978-3-527-31698-4. Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets,...
Jenny Stanford Publishing Pte. Ltd., 2021. — 566 p. — ISBN 978-981-4800-85-3. The past two decades have seen rapid development of micro-/nanotechnologies with the integration of chemical engineering, biomedical engineering, chemistry, and life sciences to form bio-MEMS or lab-on-chip devices that help us perform cellular analysis in a complex micro-/nanoflluidic environment...
Springer, 2021. — 204 p. — (Energy Systems in Electrical Engineering). — ISBN 978-9811606052. This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters. It serves as a complete guide from design, FEM, and fabrication to characterization. Each chapter of this volume...
337 pages, 2001 by Butterworth-Heinemann, 2nd ed. ISBN: 0-7506-7280-3 This book examines various board-test techniques, relating how they fit into an overall product design/manufacturing/test strategy. It discusses economic, management, and technical issues, and attempts to weave them into a coherent fabric. Looking at that fabric as a whole is much more rewarding than paying...
MDPI, 2018. – 174 p. – ISBN: 978-3-03897-006-4. Printed Edition of the Special Issue Published in Micromachines. Electromechanical transducers that utilize the piezoelectric effect have been increasingly used in micro-electromechanical systems (MEMS) either as substrates or as thin films. Piezoelectric transducers feature a linear voltage response, no snap-in behaviour, and can...
Springer Heidelberg Dordrecht London New York, 2011, XXII, 322 p. — ISBN: 978-3-642-19488-7, e-ISBN: 978-3-642-19489-4, DOI 10.1007/978-3-642-19489-4 — (RWTHedition). Many tables with equations required for calculations of basic elements Systematic description of most actuators and sensors in micro technique Includes exercises Characteristic curves of most actuators and sensors...
Springer, 2005. — 184 p. — ISBN: 978-3-540-22187-5. This monograph is intended for wire bonding and flip-chip packaging professionals and for scientists and engineers working in the field of mechanical microsensors. New measurement technologies are introduced that allow in situ and real-time examination of physical processes during the packaging process or during subsequent...
Artech House, 2006. — 219 p. — ISBN: 1-58053-901-7. This groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240...
Wiley – IEEE Press, 2020. — 162 p. — ISBN: 978-1-119-44192-2. Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which...
Kluwer Academic Publishers, 2001. — 689 p. — ISBN: 0-306-47601-0. Microsystem design now cuts across most disciplines in engineering and is the focus for courses, and degree programs, at many major universities. These courses, which must be open to individuals with a wide range of backgrounds, need material covering an equally wide range of subjects in a coherent, unified way....
MDPI, 2019. — 136 p. — ISBN: 978-3-03897-843-5. Printed Edition of the Special Issue Published in Micromachines. While conventional group IV or III-V based device technologies have reached their technical limitations (e.g., limited detection wavelength range or low power handling capability), wide bandgap (WBG) semiconductors which have band-gaps greater than 3 eV have gained...
Springer, 2005. — 414 p. The field of electroceramics (inorganic, non-metallic materials, often polycrystalline, with useful electrical and other functional properties) provides a vast number of active materials for sensors, actuators, and electrical and electronic components. Electroceramic thin films can add therefore many useful functionalities to MEMS. At the same time,...
Springer, 2007. — 502 p. — ISBN: 978-3-642-15311-2. This book presents the latest and complete information about various types of piezosensors. A sensor is a converter of the measured physical size to an electric signal. Piezoelectric transducers and sensors are based on piezoelectric effects. They have proven to be versatile tools for the measurement of various processes. They...
Springer, 2011. — 498 p. This book is devoted to piezoceramic sensors, which are widely used in hydroacoustics, electroacoustics, medicine, measuring, test engineering and non-destructive control. The author and his co-workers’ work results are described here for the first time. This book gives complete update information on various types of piezosensors. Each sensor transforms...
Springer, 2009. — 641 p. — ISBN: 978-0-387-68351-5. This book describes MEMS technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. Photonic Microsystems also describes the phenomenon of Photonic crystals (nanophotonics) and demonstrates their ability to enable...
Springer, 2018. — 133 p. — (Analog Circuits and Signal Processing). — ISBN 978-3-319-62306-1. Nowadays, smart temperature sensors, i.e., sensors with digital outputs, are widely used in various systems. Integrating smart sensors into wireless systems such as RFID tags or wireless sensor networks (WSNs) enables wireless temperature sensing, which in turn opens up a wide range of...
Berlin: Springer-Verlag, 2007. — 484 p. — (Springer Series on Chemical Sensors and Biosensors. Methods and Applications 5). — ISBN-10 3-540-36567-2, ISBN-13 978-3-540-36567-9. The book is intended to give a state-of-the-art overview of the recent achievements in the area of piezoelectric sensors. The focus lies on thickness shear mode (TSM) resonators, since this class of...
Wiley, 2015. – 603 p. – ISBN: 978-3-527-69022-0. This ready-made reference book, combining robotics, microsystem technology and nanotechnology, summarizes the main provisions and new applications in this fascinating research field. This is the first book to introduce tools specifically designed and made for manipulating micro- and nanometer-sized objects, and presents such...
Wiley, 2008. – 325 p. – ISBN: 978-3-527-31494-2. This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability...
InTech, 2009. — 522 p. — ISBN: 978-953-307-027-8. This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS...
InTech, 2013. — 233 p. На англ. языке. Reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects...
Springer, 2008. - 422 p. (Series in Integrated Circuits and Systems). Wafer Level 3-D ICs Process Technology focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses alternative technology platforms for pre-packaging wafer level 3-D ICs, with an emphasis on wafer-to-wafer stacking. Driven by the need for improved...
Heidelberg, Dordrecht, London, New York: Springer, 2010. — 207 p. — ISBN:3540439668, e-ISBN 978-3-540-68427-5. Intended as an introduction and reference for materials scientists and physicists, this book treats the fundamental physics of piezoleletric sensors. It begins with the elements of phenomenological crystal physics to develop a fundamental understanding of...
2nd Edition. – Elsevier, 2015. — 825 p. — ISBN: 978-0-323-29965-7. The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the...
Scrivener Publishing / Wiley, 2015. — 421 p. — (Materials Degradation and Failure Series). — ISBN: 978-1-119-08360-3. The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being...
RSC Publishing, 2008. — 220 p. — ISBN: 978-0-85404-140-4. In this multi-author work the editor has assembled a series of chapters describing well-established principles of, and novel approaches to, the design of nano and microsensors. Some examples of applications or potential uses in the field of biological terrorism surveillance are given. Amongst the profuse literature on...
MDPI, 2017. — 230 p. This edition is a reprint of the Special Issue published online in the open access journal Micromachines from 2015–2016. The Special Issue of Micromachines entitled “Micro/Nano Devices for Chemical Analysis” presents a total of 17 papers, including three unique reviews and two communications. Four papers relate to the microfluidic-based sensing techniques;...
McGraw-Hill, 2000. — 977 p. — ISBN: 0-07-137169-6. Written by Rao Tummala, the field’s leading author, Fundamentals of Microsystems Packaging is the only book to cover the field from wafer to systems, including every major contributing technology. This rigorous and thorough introduction to electronic packaging technologies gives you a solid grounding in microelectronics,...
Springer, 1992. — 478 p. — ISBN: 978-94-011-1818-7. Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact...
Marcel Dekker, 2003. — xiv, 489 p. — (Materials Engineering, 22). — ISBN: 9780824741099. This reference reveals the most significant technologies, procedures, and trends in the design and application of actuator devices for micromechatronic systems. It addresses critical design and manufacturing concepts, as well as challenges in the modeling and regulation of electromechanical...
Springer, 2006. — 258 p. — ISBN: 978-3-540-31333-5. The purpose of this book is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics through not only theoretical and experimental results, but also by describing various products and their fields of application. After...
Woodhead Publishing, 2013. — 640 p. — (Woodhead Publishing Series in Electronic and Optical Materials, 45). — ISBN: 978-0-85709-861-0. The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook...
The Institution of Engineering and Technology, 2000. — 266 p. — ISBN: 978-0085296-779-9. The authors provide descriptions of the operation, characteristics and applications of the sensors on which they work, together with recent advances and prospects for the future. Whilst the motivation for producing this book has been to provide a textbook for postgraduate students, the...
Springer, 2004. — 308 p. — ISBN: 978-1-4020-2782-6. Intelligent/smart systems have become common practice in many engineering applications. On the other hand, current low cost standard CMOS technology (and future foreseeable developments) makes available enormous potentialities. The next breakthrough will be the design and development of "smart adaptive systems on silicon" i.e....
Gistrup: River Publishers, 2021. — 276 p. Considerable amount of effort has been devoted, over the recent years, towards the development of electronic skin (e-skin) for many application domains such as prosthetics, robotics, and industrial automation. Electronic Skin: Sensors and Systems focuses on the main components constituting the e-skin system. The e-skin system is based...
Springer, 1998. — 210 p. — ISBN: 978-1-4757-2890-3. The (signal processing and storage) capacity of the human brain enables us to become powerful autonomous beings, but only if our brains operate in conjunction with (at least some of) our senses and muscles. Using these organs, we can interact with our environment, learn to adapt, and improve important aspects of our life....
MDPI, 2019. – 199 p. – ISBN: 978-3-03921-563-8. Printed Edition of the Special Issue Published in Micromachines. This volume highlights a diverse collection of research on single cell manipulation, diagnostics, cell migration, cell flow cytometry, to name a few. This volume shows the importance of using microfluidics as a tool to understand cells and other organisms or even...
Texas State Technical College, 2004. — 76 p. The importance of emerging technologies to the economic well being of Texas and to the quality of life of its citizens was clearly recognized in 1999 when the Texas State Senate charged TSTC to “develop and administer a program to forecast the types of technical education programs that are needed to maintain and improve the State’s...
Wiley, 2006. — 401 p. — ISBN 978-0-470-09361-0. Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components....
John Wiley & Sons, 2003. — 394 p. Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS...
New York: Springer, 2017. — 638 p. This textbook provides a comprehensive, fully-updated introduction to the essentials of nanometer CMOS integrated circuits. It includes aspects of scaling to even beyond 12nm CMOS technologies and designs. It clearly describes the fundamental CMOS operating principles and presents substantial insight into the various aspects of design...
3rd Edition. — Springer, 2025. — 697 p. — ISBN 978-3-031-64248-7. This textbook provides a comprehensive, fully-updated introduction to the essentials of nanometer CMOS integrated circuits. It includes aspects of scaling to even beyond 3nm CMOS technologies and designs. It clearly describes the fundamental CMOS operating principles and presents substantial insight into the...
MDPI, 2019. – 165 p. – ISBN: 978-3-03921-069-5. Printed Edition of the Special Issue Published in Micromachines. Micro and nanoelectromechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within integrated circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for...
New York: Springer, 2014. — 509 p.
The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with...
Springer, 2010. — 206 p. In the early 60s, the watchmaking industry realized that the newly invented integrated circuit technology could possibly be applied to develop electronic wristwatches. But it was immediately obvious that the precision and stability required for the time base could not be obtained by purely electronic means. A mechanical resonator had to be used,...
Wiley, 2008. — 285 p. For the last 50 years, the power of integrated circuits has continued to grow. However, this performance will end up reaching its physical limit. What new ways will then be available to develop even more powerful and up-to-date systems? This book introduces the principles of quantic computing, the use of nano-tubes in molecular transistors and ADN computing....
Boca Raton: CRC Press, 2006. — 463 p. — ISBN: 978-0-8493-3532-7. Microelectromechanical systems (MEMS) are evolving into highly integrated technologies for a variety of application areas. Add the biological dimension to the mix and a host of new problems and issues arise that require a broad understanding of aspects from basic, materials, and medical sciences in addition to...
249 pp.
Springer Science+Business Media, LLC 2011
This book is intended for the practicing microelectromechanical sensor designer as well as engineers and engineering managers in other fields. This book provides an introduction to harsh environment sensor applications and silicon carbide microelectronics and microelectromechanical system technology for such applications. Namely,...
Materials Science and Engineering R 56 (2007) 1–129 (Elsevier B.V. )
This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic...
MDPI, 2019. – 173 p. – ISBN: 978-3-03921-304-7. Printed Edition of the Special Issue Published in Micromachines. Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale. Optical MEMS have had enormous...
Springer Nature Switzerland AG 2022, 312 pages, ISBN 978-3-030-79748-5 Nano-electro-mechanical systems (NEMS) are a class of devices evolved from microelectromechanical systems (MEMS). MEMS have been developed for more than half a century with the potential to radically transform commercial markets and people’s lives. MEMS applications are multiple and have ranged from uses as...
Springer-Verlag Berlin, 2012, 335 pages, ISBN: 3642224792. This book presents the fabrication of optoelectronic nanodevices. The structures considered are nanowires, nanorods, hybrid semiconductor nanostructures, wide bandgap nanostructures for visible light emitters and graphene. The device applications of these structures are broadly explained. The book deals also with the...
Springer Science & Business Media, 2005. – 480 p. The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute...
Springer, 2004. — 148 p. — ISBN: 978-3-662-09899-8. This book is based on the research conducted in Micro Structures and Sensors Laboratory, Microscale Heat Transfer Laboratory, and Microfluidics Laboratory at Stanford University, where a closed-loop silicon microchannel two-phase cooling system was invented. Although microchannel heat sink has received more and more attention...
Wiley-VCH, 2017. — 984 p. — ISBN: 978-3527338320 (print), ISBN: 978-3527687206 (epdf), ISBN: 978-3527687176 (EPUB), ISBN: 978-3527687183 (MOBI), ISBN: 978-3527687169 (obook). Unique in its integration of individual topics to achieve a full-system approach, this book addresses all the aspects essential for industrial inkjet printing. After an introduction listing the industrial...
Wiley-VCH, 2017. — 984 p. — ISBN: 978-3527338320 (print), ISBN: 978-3527687206 (epdf), ISBN: 978-3527687176 (EPUB), ISBN: 978-3527687183 (MOBI), ISBN: 978-3527687169 (obook). Unique in its integration of individual topics to achieve a full-system approach, this book addresses all the aspects essential for industrial inkjet printing. After an introduction listing the industrial...
New York: Springer, 2017. — 367 p. This book comprehensively and systematically introduces readers to the theories, structures, performance and applications of non-driven mechanical and non-driven micromechanical gyroscopes. The book is divided into three parts, the first of which mainly addresses mathematic models, precision, performance and operating error in non-driven...
Springer, 2023. — 196 p. This book covers key topics in the emerging field of plasmonic MEMS, with an emphasis on practical aspects. Although readers can find many comprehensive textbooks on electromagnetic waves, nanophotonics and plasmonics, most of these lack the focus needed for a thorough grasp of plasmonic micromachining and MEMS. This book introduces the main framework...
Zhang L. et al. Magnetic Micro and Nanorobot Swarms: From Fundamentals to Applications Springer, 2023. — 363 p. — ISBN-13 978-9819930357 This book is focused on the attractive emerging field of micro-/nanorobot swarms (microswarms). It introduces fundamental understandings of various microswarms, including pattern generation, transformation, locomotion, and imaging. This book...
Wiley, 2017. – 338 p. – ISBN: 978-1-118-71796-7. A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale: Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement...
MDPI, 2019. – 217 p. – ISBN: 978-3-03921-605-5. Printed Edition of the Special Issue Published in Micromachines. Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in...
Woodhead Publishing Limited, 2008, 810 pages Many recent advances in technology have been associated with nanotechnology and the miniaturization of components, devices and systems. Microjoining has been closely associated with the evolution of microelectronic packaging, but actually covers a much broader area, and is essential for manufacturing many electronic, precision and...
Tsinghua University Press / Springer, 2012. — 1008 p. — ISBN: 978-3-642-18293-8. “Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest...
New York: Springer, 2020. — 220 p. This book reviews advances in cutting-edge micro-/nano-electrometers, and discusses the technological challenges involved in their practical implementation. The detection of electrostatic charge has a wide range of applications in ionization chambers, bio-analyte and aerosol particle instruments, mass spectrometers, scanning tunneling...
Учебное пособие. — Ростов-на-Дону: Южный федеральный университет, 2014. — 99 с. Междисциплинарное авторское учебное пособие, предназначенное для факультативного изучения студентами, обучающимися по направлению подготовки «Техносферная безопасность». Рассмотрены структура и принципы функционирования мультисенсорной системы на базе массива ионоселективных электродов для...
Монографія. — Київ: НТТУ КПІ ім. Ігоря Сікорського; Політехніка, 2018. — 396 с. В монографії систематизовані та викладені матеріали з основних методів, методик та засобів контролю параметрів якості функціональних покриттів у приладобудуванні. Розглянуто основні механізми та принципи дії пристроїв для фізико-аналітичного визначення основних параметрів та характеристик тонких...
Монографія. — Київ : НТТУ «КПІ»; Політехніка, 2016. — 360 с. Систематизовано матеріали основних типів та властивостей покриттів, методів і засобів їх формування у приладобудуванні. Розглянуто основні механізми й моделі формування тонких покриттів, які наносять на різноманітні поверхні виробів точного приладобудування; а також основні стадії росту плівок та дефекти, які...
Том 1 — М.: ДМК Пресс, 2001. — 544 с.: ил. — (Учебник). — Электронная версия 373 с.
Том 2: Справочные сведения о наиболее известных и распространенных изделиях микромагнитоэлектроники. — М.: 2002. — 691 с. Распознано
Посвящается новому направлению техники – микромагнитоэлектронике.
Состоит из двух частей. В первой части в доступной форме излагаются принципы работы современных...
Учебное пособие. – Пенза, 2003. – 79 с. В данной работе рассматриваются конструктивно-технологические решения полупроводниковых тензочувствительных элементов датчиков давлений, в частности общие вопросы измерения давления, принципы построения ПТЧЭ датчиков давлений, а также технологические методы создания таких ПТЧЭ. Введение Общие вопросы измерения давления. Давление как...
Навчальний посібник. — К.: Інтерсервіс, 2015. — 383 с. — ISBN 978-617-696-291-5. Наведено основні відомості про сучасний рівень науково-технічних досягнень у галузі наноелектроніки на основі напівпровідників, феромагнетиків, надпровідників, графену, вуглецевих нанотрубок та описані інші підходи. Посібник призначений для студентів ВНЗ України з електроніки, радіофізики, фізики,...
К.: Інтерсервіс, 2015. — 383 с. — ISBN 978-617-696-291-5 Наведено основні відомості про сучасний рівень науково-технічних досягнень у галузі наноелектроніки на основі напівпровідників, феромагнетиків, надпровідників, графену, вуглецевих нанотрубок та описані інші підходи. Посібник призначений для студентів ВНЗ України з електроніки, радіофізики, фізики, прикладної фізики, для...
М.: Энергоатомиздат, 1983. - 136 с., ил.
Представлено одно из новейших направлений в создании пролупроводниковых тензометрических измерительных преобразователей, основанное на использовании технологии микроэлектроники. Рассмотрены физические , технологические и схемотехнические вопросы разработки интегральных тензопреобразователей.
Для специалистов, работающих в области...
Монография в двух частях. — М.: Техносфера, 2018. — 550 с. — ISBN 978-5-94836-498-8. В книге изложены современные принципы построения, методы расчета и проектирования микросистемных датчиков физических величин и измерительных систем на их основе. Приведены примеры разработок новых изделий. Направления «Электроника и наноэлектроника», «Радиотехника», «Инфокоммуникационные...
Монография в двух частях. — Москва: Техносфера, 2018. — 550 с. — ISBN: 978-5-94836-498-8. В книге изложены современные принципы построения, методы расчета и проектирования микросистемных датчиков физических величин и измерительных систем на их основе. Приведены примеры разработок новых изделий. Направления «Электроника и наноэлектроника», «Радиотехника», «Инфокоммуникационные...
М.: Техносфера, 2004. — 528 с. — ISBN: 5-94836-030-Х. В монографии подробно рассмотрены вопросы проектирования и применения, а также технологические аспекты производства разнообразных микроэлектромеханических устройств: переключателей, регулируемых индукторов и конденсаторов, фильтров, фазовращателей, линий передач и антенн, приведены преимущества и недостатки каждой отдельной...
М.: Техносфера, 2004. — 528 с. — ISBN: 5-94836-030-Х. В монографии подробно рассмотрены вопросы проектирования и применения, а также технологические аспекты производства разнообразных микроэлектромеханических устройств: переключателей, регулируемых индукторов и конденсаторов, фильтров, фазовращателей, линий передач и антенн, приведены преимущества и недостатки каждой отдельной...
В.П. Василевич, А.М. Кисель, А.Б. Медведева, В.И. Плебанович, Ю.А. Родионов. — Полоцк: ПГУ, 2001 — 260 с. (книга не полностью, только 190 страниц). В монографии изложены основы химической обработки полупроводниковых пластин и технологии производства интегральных микросхем (ИМС). Проведена классификация загрязнений на поверхности пластин. Определено влияние каждого вида...
Учебно-методическое пособие. — СПб.: Университет ИТМО, 2020. — 65 с. В пособии приведены основы оптических 3D технологий получения микро и наноразмерных элементов фотоники и информационных систем - технологий голографии, литографии и 3D печати. Рассмотрены физические принципы и процессы, лежащие в основе технологий, примеры и характеристики элементов, направления применений....
СПб.: СПбИТМО, 2008. – 100 с. В учебном пособии рассмотрены процессы формирования микроструктурных элементов фотоники и информационных систем (MEMS и MEOMS), в том числе фотонных кристаллов, основанные на оптических методах: оптической литографии, голографии и фотоотверждения полимеров. Приведены основы современных технологий получения элементов и структур микронных,...
За ред. З.Ю. Готри Мікроелектронні сенсори фізичних величин: науково-навчальне видання. В 3 томах. Том 2. Львів: Ліга-Прес, 2003. - 595 с. В другому томі науково-навчального видання описані принципи функціонування конструкції і характеристики мікроелектронних сенсорів температури, мікроелектронних сенсорів механічних величин, сенсорів фізичних величин на основі розподілених...
Монографія. — Київ: Едельвейс, 2016. — 104 с. У монографії розглядаються теоретичні засади побудови нового виду ефективних мікроперетворювачів механічних коливань і вібрацій в електричний сигнал на основі використання мікро- і наноперетворювачів. Проаналізовано можливості використання при їх побудові нових фізичних та інформаційних технологій, призначених для систем різного...
Саратов: Изд-во Сарат. ун-та, 2009. 374.с. Глухова О.Е, Гороховский А.В., Жуков Н.Д., Климов Б.Н., Штыков С.Н., Щёголев С.Ю. Книга содержит анализ современных промышленных приложений нанотехнологии, получивших в литературе и официальных документах название «наноиндустрия». Рассмотрены все направления развития отечественной наноиндустрии: организационные, технологические,...
Учебное пособие. — Петрозаводск: Из-во ПетрГУ, 2016. — 171 с. В пособии приводится анализ распространённых типов микроэлектромеханических систем (МЭМС) и нанооэлектромеханических систем (НЭМС), сферы их применения, основные способы изготовления с описанием базовых технологических процессов, физические принципы, лежащие в основе работы МЭМС, а также способы компьютерного...
Учебное пособие. — М:. Петрозаводск, 2016. — 141 с. В учебном пособии представлены материалы и базовые технологии, используемые в разработке и производстве микроэлектромеханических систем (МЭМС), оптических МЭМС, биомедицинских МЭМС. Рассматриваются физические основы работы датчиков и исполнительных механизмов в МЭМС-устройствах, методы аналогий для анализа МЭМС и пакеты для...
Учебное пособие. – СПб: Университет ИТМО, 2020. – 75 с. В учебном пособии рассмотрены вопросы актуальных областей применения МЭМС и датчиков, созданных на основе микротехнологий, основные материалы микросенсорной техники, а также элементная база микромеханических приборов, конструкции и принципы работы микромеханических приборов и их измерительные свойства. Предназначено для...
Лабораторный практикум. — М.: МИСиС, 2011. — 161 с. Содержит описание 12 лабораторных работ по курсам «Технология материалов магнитоэлектроники» и «Материаловедение магнитоэлектроники». Приведены методики определения характеристик порошков, а также измерения и расчета электромагнитных и механических свойств спеченных керамических материалов. Рассмотрена связь химического и...
Лабораторный практикум. — М.: МИСиС, 2011. — 161 с. Содержит описание 12 лабораторных работ по курсам «Технология материалов магнитоэлектроники» и «Материаловедение магнитоэлектроники». Приведены методики определения характеристик порошков, а также измерения и расчета электромагнитных и механических свойств спеченных керамических материалов. Рассмотрена связь химического и...
М.: ДМК Пресс, 2018. — 140 с.: ил. Эволюционное развитие техники подошло к рубежу крупных изменений; открылись новые интересные задачи – разведка полезных ископаемых, предсказание землетрясений, сверхточное измерение положений железнодорожных путей и нефтепроводов, инновации в медицинской технике и др. В четырех тематических главах книги рассматриваются измерительные и силовые...
Минск: Белорусский государственный университет информатики и радиоэлектроники (БГУИР), 2018. — 196 с. — ISBN: 978-985-543-341-6. Предназначено для изучения второй части интегрированной дисциплины «Основы твердотельной электроники», которая состоит из технологической и приборной частей. Рассматривается физика работы, параметры и конструкции маломощных и силовых моно- и...
Учебное пособие. — Минск: Белорусский государственный университет информатики и радиоэлектроники, 2018. — 196 с. — ISBN: 978-985-543-341-6. Предназначено для изучения второй части интегрированной дисциплины «Основы твердотельной электроники», которая состоит из технологической и приборной частей. Рассматривается физика работы, параметры и конструкции маломощных и силовых моно-...
Учебное пособие. — Харьков: Нац. аэрокосм. ун-т "Харьк. авиац. ин-т", 2006. – 82 с. Представлен систематизированный аналитический обзор основных современных зарубежных публикаций по тематике разработки и использования микроэлектромеханических устройств. Приведен обширный перечень базовых работ, а также изложен оригинальный материал по результатам научно-исследовательских работ,...
Учебное пособие. — Таганрог: ТТИ ЮФУ, 2009. — 117 с. В учебном пособии рассмотрены основные вопросы, затрагиваемые в первых 12 лекциях, читаемых в рамках дисциплины «Компоненты микросистемной техники». Целью преподавания дисциплины «Компоненты микросистемной техники» является формирование знаний об элементах и компонентах микросистем, базовых физических принципах их...
Учебное пособие. — Омск: Изд-во ОмГТУ, 2016. — 247 с. — ISBN: 978-5-8149-2355-4. Приведены примеры использования в радиотехнических устройствах микроэлектромеханических систем (МЭМС) различного вида: коммутаторов, актюаторов, датчиков физических величин, гироскопов, акселерометров и других. Представлена классификация датчиков инерции: акселерометров, гироскопов. Приведены...
Учебное пособие. — Омск: Изд-во ОмГТУ, 2015. — 74 с. — ISBN: 978-5-8149-2048-5. Изложены особенности построения резонаторов и генераторов на основе микроэлектромеханических систем (МЭМС). Приведены технические характеристики МЭМС-генераторов компаний SiTime, Vectron International, Discera. Рассмотрены принципы работы и параметры МЭМС-резонаторов. Учебное пособие предназначено...
Учебное пособие. — Владимир: Владимирский государственный университет имени А.Г. и Н.Г. Столетовых, 2014. — 94 с. — ISBN 978-5-9984-0477-1. Рассмотрены вопросы проектирования устройств систем связи, выполненных по технологиям микросистемной техники. Особое внимание уделено вопросам автоматизированного проектирования устройств микросистемной техники, конструктивному исполнению...
Рассматриваются базовых принципов функционирования и
конструирования механических и электромеханических элементов и устройств, реализуемых на микроуровне, а также основные технологии изготовления микроустройств. (Показаны основные маршруты изготовления, используемые в современных производствах)
Учебное пособие. — Таганрог: ТРТУ, 2005. — 103 с. — ISBN 5-8327-0231-X. В учебном пособии рассмотрены сенсорные и актюаторные элементы микросистемной техники (МСТ) и средства их проектирования. В первом разделе пособия кратко рассмотрены основные технологии изготовления элементов МСТ. Во втором и третьем разделах описаны конструкции и принципы функционирования сенсорных и...
Лекции: Введение. Основные понятия и термины. Параметры и характеристики микросистем. Чувствительные элементы для микросистем. Сенсорные компоненты МСТ. Пьезоэлектрические датчики. Сенсорные компоненты МСТ. Сенсорные компоненты МСТ. Сенсорные компоненты МСТ. Актюаторные элементы МСТ. Микромеханические ключи. Интегральные микрозеркала. Интегральные микродвигатели. Катушки...
Таганрог, ТГТУ (Технический Институт ЮФУ), 2007 г. - 27 с. В данной работе приведены примеры расчётов сенсоров и актюаторов по курсу «Микроэлектромеханика». Целью их выполнения является приобретение студентами практических навыков по расчету микромеханических элементов микросистемной техники с электростатической и тепловой активацией. Для студентов специальностей 210108...
Учебное пособие. - Таганрог: Изд-во ТТИ ЮФУ, 2009. - 50 с. В учебном пособии рассматриваются физические возможности измерения температуры, используемые в микросистемной технике (МСТ), и возможности их интегральной реализации. В частности, подробно описываются активные сенсоры температуры на основе термоэлектричества (эффект Зеебека), пассивные способы, основанные на измерении...
Учебное пособие. - Таганрог: Изд-во ТТИ ЮФУ, 2009. - 50 с. В учебном пособии рассматриваются физические возможности измерения температуры, используемые в микросистемной технике (МСТ), и возможности их интегральной реализации. В частности, подробно описываются активные сенсоры температуры на основе термоэлектричества (эффект Зеебека), пассивные способы, основанные на измерении...
Москва, Издательство МГТУ им. Н.Э. Баумана, 1998 г.
Учебное пособие посвящено основным вопросам проектирования волнового твердотельного гироскопа, включая выбор расчетной модели погрешностей, рекомендации по определению параметров систем управления резонатором, съема и обработки информации, методике балансировки и испытаний гироскопа.
Учебное пособие написано в соответствии с...
Таганрог, ТГРТУ (ЮФУ), 2007 г. , 125 стр. Учебное пособие. Рассмотрена общая классификация датчиков и теория измерений, основные схемы включения датчиков и их расчёт, физические основы микросистемной техники и полупроводниковых приборов, тензорезистивные сенсоры, пьезоэлектрические сенсоры, термоэлектрические сенсоры, датчики ускорения, вибрации, потока, гироскопы, магнитные...
Учебное пособие. — Таганрог: ТРТУ, 2004. — 54 с.
В учебном пособии рассмотрено использование электрического поля в компонентах микросистемной техники (МСТ). Первый раздел пособия содержит краткое изложение традиционных сведений об основных закономерностях электрического поля. Во втором разделе излагаются вопросы механики, описывающие поведения компонентов МСТ, находящихся в...
Нальчик: Кабардино-Балкарский государственный университет, 2008. - 79 с.
В сборнике публикуются материалы докладов, представленных на Международной научно-технической конференции "Микро- и нанотехнологии и фотоэлектроника". Конференция проходила в Эльбрусском учебно-научном комплексе Кабардино-Балкарского государственного университета с 13 по 19 июля 2008 г.
Минск: Беларус. навука, 2012г.- 257с . Рассмотрены принципы формирования анодного оксида алюминия, приведены его основные физико-механические свойства, технологические методы получения пленарных и объемных микроструктур. Выведены обобщенные универсальные формулы взаимодействия активных и реактивных сил в электростатических, электротоковых и других микроактюаторах. Определены...
Москва: Издательство МГТУ им. Н.Э. Баумана, 2011. — 49 с.
Микросистемная техника – активно развивающееся направле
ние, создающее функционально законченные нано и микроразмер
ные устройства, характеристики которых кардинальным образом
отличаются от характеристик устройств аналогичного назначения,
созданных по традиционным технологиям.
Учебное пособие содержит сведения о...
Учебное пособие. — Красноярск: Сибирский федеральный университет, 2013. — 264 с. — ISBN: 987-5-7638-2491-9 Раскрывается технологический аспект сенсорики, приводятся сведения о большом многообразии сенсоров. Отмечается важность нанотехнологического подхода к изготовлению сенсоров. Представлена информация о материалах химических сенсоров, их свойствах и принципах конструирования....
Учебное пособие для ВУЗов. — М.: Инфра-М / Красноярск: Уральский федеральный ун-т, 2014. — 273 с.: ил. — ISBN: 978-5-16-100352-7. В учебном пособии раскрывается технологический аспект сенсорики и приводятся сведения о большом многообразии сенсоров. Отмечается важность нанотехнологического подхода к изготовлению сенсоров. Представлена информация о материалах химических сенсоров,...
Учебное пособие. — Москва: Московский технологический университет (МИРЭА), 2016. — 85 с. В учебном пособии излагаются сведения о методах работы со специализированной профессиональной средой автоматизированного проектирования CoventorWare. На примере моделирования теплового матричного приемника излучения, являющегося основным элементом современных портативных тепловизионных...
Учебное пособие. — М.: Машиностроение, 2007. — 400 с.
Изложены терминология, классификация, конструкции и принципы работы микромеханических осевых и маятниковых акселерометров, датчиков давления и гироскопов LL-, LR- и RR-типов. Даны описание и расчет прямых (датчиков перемещений и деформаций) и обратных (датчиков сил и моментов) преобразователей в микромеханическом исполнении,...
Учебное пособие. - М.: Машиностроение, 2007. - 400 с.: ил.
Изложены терминология, классификация, конструкции и принципы работы микромеханических осевых и маятниковых акселерометров, датчиков давления и гироскопов LL-, LR- и RR-типов. Даны описание и расчет прямых (датчиков перемещений и деформаций) и обратных (датчиков сил и моментов) преобразователей в микромеханическом...
Учебное пособие. — М.: Инфра-Инженерия, 2019. — 289 с. — ISBN 978-5-9729-0336-8. Рассмотрены основные твердотельные датчики, применяемые преимущественно в наукоемких областях (точная механика и оптика, микро- и наноэлектроника. атомная энергетика, военное дело): датчики на основе гальваномагнитных эффектов, датчики давления, температуры и теплового излучения, скорости и...
Учебное пособие. — М.: Инфра-Инженерия, 2019. — 288 с.: ил., табл. — ISBN 978-5-9729-0336-8. Рассмотрены основные твердотельные датчики, применяемые преимущественно в наукоемких областях (точная механика и оптика, микро- и наноэлектроника. атомная энергетика, военное дело): датчики на основе гальваномагнитных эффектов, датчики давления, температуры и теплового излучения,...
Учебное пособие. — Таганрог: Южный федеральный университет, 2013. — 95 с. Бурный рост сенсорики в настоящее время привел к тому, что при создании сенсоров зачастую используется сочетание различные физических принципов действия и новых направлений технологий, например микромеханики и микроэлектроники. Учебное пособие посвящено вопросам конструктивно-технологических решений...
Учебное пособие. — Саратов: СГТУ, 2021. — 132 c. Рассмотрены физико-химические принципы работы, устройство и применение различных типов сенсоров. Основное внимание уделено построению микросенсоров в рамках современных микроэлектронных и нанотехнологий. Представлены общие концепции получения сенсорных сигналов и их виды в рамках электрических измерений. Классификация сенсоров...
Авторский коллектив: Тимофеев В. Н., Погалов А. И., Угольников С. В., Андрианов А. М., Панкратов О. В. М. : БИНОМ. Лаборатория знаний, 2009. — 176 с. : ил. ISBN: 978-5-94774-907-6 Пособие посвящено механике микросистем, являющейся составной частью физики микросистем. Изложены основы теории механических колебаний, анализа напряженно-деформированного состояния несущих элементов,...
Учебное пособие. — СПб: Университет ИТМО, 2024. — 54 с. В учебном пособии представлены тенденции и перспективы развития интегрированных автоматизированных технологий в микросистемной технике. Рассмотрены вопросы многоуровневой адаптации интегрированных автоматизированных систем управления и создания единого информационного пространства. Освещены теоретические основы...
В сборнике представлены тезисы докладов 14 научной молодежной школы (24 – 25 ноября 2011 г., Санкт-Петербург). Тематика докладов - современная микро- и наноэлектроника, энергетика. Организаторы- СПбГЭТУ "ЛЭТИ". ФТИ им. А. Ф. Иоффе РАН. Пленарные доклады Лучинин В.В. Формирование нового технологического уклада Афанасьев В.П., Забродский А. Г. Состояние и тенденции повышения...
В сборнике представлены тезисы докладов 12 научной молодежной школы (10-11 октября 2009г. СПб, п. Репино, пансионат "Заря"). Тематика докладов - современная микро- и наноэлектроника, нанодиагностика, микро- и нанотехнологии. Организаторы- СПбГЭТУ "ЛЭТИ". ФТИ им. А. Ф. Иоффе РАН, ИХС им. И. В. Гребенщикова РАН.
Пленарные доклады.
В. В. Лучинин, Ю. М. Таиров. (СПбГЭТУ "ЛЭТИ") О...
Сборник материалов и тезисов докладов 13-й научной молодежной школы по твердотельной электронике Физика и технология микро- и наносистем (12 – 13 ноября 2010 г. Санкт-Петербург, г. Зеленогорск), 99 с.
Тематика связана с решением актуальных задач современной микро- и наноэлектроники, микро- и нанодиагностики, микро- и нанотехнологии, физики твердого тела. Ее цель – развитие...
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