Cox D.C. Introduction to Focused Ion Beam Nanometrology

Morgan & Claypool Publishers, 2015. — 84 p. — ISBN 978-1-6817-4020-1.Введение в нанометрологию сфокусированного ионного пучка
Metrology is the science of measurement and can have several meanings, depend ing on whom or what it is being applied to. Broadly, these can be classified in three areas. Firstly, it is used to create legal definitions of quantities such as weights and measures, applied to our every day purchases of items and the environment around us. Secondly, all industrial activity is underpinned by metrology. Components manufactured in different parts of our increasingly globalised world must be compatible with components made and assembled elsewhere. These compatibilities might comprise more than simple dimensional agreement, but may also be dependent on other measures such as voltage or chemical composition. Thirdly, fundamental metrology is concerned with developing new methods of measure ment, establishing agreed standards, definitions and units of measurement and providing traceable measurements from which standards can be created and applied. It is fundamental metrology that underpins all of the other metrological activities. The field of fundamental metrology is extremely broad, often complex, and sometimes quite abstract. A 2004 definition stressing the huge range to which metrology can be applied was offered by the International Bureau of Weights and Measures (BIPM) ‘The science of measurement, embracing both experimental and theoretical determinations at any level of uncertainty in any field of science and technology’Preface
Metrology
Focused ion beam
Ion–solid interactions
Focused ion beam—materials science applications
Focused ion beam fabrication for metrology
Future developments