Bäuerle D. Laser Processing and Chemistry

3rd Edition. — Springer, 2000. — 781 p. — ISBN: 3540668918.Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This third edition has been revised and enlarged to cover new topics such as the synthesis of nanoclusters and nanocrystalline films, ultrashort-pulse laser processing, laser polishing, cleaning, and lithography. Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.Overview and FundamentalsThermal, Photophysical, and Photochemical Processes
Reaction Kinetics and Transport of Species
Nucleation and Cluster Formation
Lasers, Experimental Aspects, Spatial Confinement
Temperature Distributions and Surface Melting
General Solutions of the Heat Equation
Semi-infinite Substrates
Infinite Slabs
Non-uniform Media
Surface Melting
Material Removal
Vaporization, Plasma Formation
Nanosecond-Laser Ablation
Ultrashort-Pulse Laser Ablation
Etching of Metals and Insulators
Etching of Semiconductors
Material Deposition
Laser-CVD of Microstructures
Growth of Fibers
Direct Writing
Thin-Film Formation by Laser-CVD
Adsorbed Layers, Laser-MBE
Liquid-Phase Deposition, Electroplating
Thin-Film Formation by Pulsed-Laser Deposition and Laser-Induced Evaporation
Material Transformations, Synthesis and Structure Formation
Structural Transformations, Laser Cleaning
Doping
Cladding, Alloying, and Synthesis
Oxidation, Nitridation, and Reduction
Transformation and Decomposition of Organic Materials
Instabilities and Structure Formation
Measurement Techniques, Diagnostics
Measurement Techniques
Analysis of Species, Plasmas, and Surfaces
Appendices
Definitions and Formulas
Tabular Presentation of the Materials Investigated
Tables