Springer-Verlag, Berlin, Heidelberg, 2009. — 364 p. — (Springer Series in MATERIALS SCIENCE 106) — ISBN: 3642093973.
Even as we tentatively enter the nanotechnology era, we are now encountering the 50th anniversary of the invention of the IC. Will silicon continue to be the pre-eminent material and will Moore's Law continue unabated, albeit in a broader economic venue, in the nanotechnology era? This monograph addresses these issues by a re-examination of the scientific and technological foundations of the micro-electronics era. It also features two visionary articles of Nobel laureates.
Historical BackgroundSilicon: Child and Progenitor of Revolution
The Economic Implications of Moore’s Law
State-of-the-Art
Using Silicon to Understand Silicon
Theory of Defects in Si: Past, Present, and Challenges
Structural, Elemental, and Chemical Complex Defects in Silicon and Their Impact on Silicon Devices
Surface and Interface Chemistry for Gate Stacks on Silicon
Enhanced Carrier Mobility for Improved CMOS Performance
Transistor Scaling to the Limit
Future DirectionsBeyond CMOS Electronics: Self-Assembled Nanostructures
Hybrid CMOS/Molecular Integrated Circuits
Sublithographic Architecture: Shifting the Responsibility for Perfection
Quantum Computing
AfterwordsNano-Whatever: Do We Really Know Where We Are Heading? Phys. Stat. Sol. (a) 202(6), 957–964 (2005)
Silicon Forever! Really? Solid-State Electr. 50(4), 516–519 (2006)