Zhang W. et al. Measurement Technology for Micro-Nanometer Devices

Wiley, 2017. – 338 p. – ISBN: 978-1-118-71796-7.
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale:
Highlights the advanced research work from industry and academia in micro-nano devices test technology
Written at both introductory and advanced levels, provides the fundamentals and theories
Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Companion website includes Lab View soft, micro-vision system test software, and algorithm software, enhancing the learning experience.About the AuthorsGeometry Measurements at the Micro/Nanoscale
Dynamic Measurements at the Micro/Nanoscale
Mechanical Characteristics Measurements
SPM for MEMS/NEMS Measurements
MEMS Online Measurements
Typical Micro/Nanoscale Device Measurements