Kovacs G.T.A. Micromachined Transducers Sourcebook

WCB/McGraw-Hill, 1998. — xx, 911. — (McGraw-Hill Series in Electrical and Computer Engineering). — ISBN: 978-0072907223.Designed for a graduate-level course in micromachined devices, or as an introduction to the field for practicing engineers, this book presents an overview of the field, beginning with-micromachining approaches and including all major categories of transduction. It examines the fabrication of individual devices through the study of design issues and provides examples of key transducers, or structures, for comparison of performances obtainable through different approaches.Introduction and Overview.
Micromachining Techniques.
Mechanical Transducers.
Optical Transducers.
Ionizing Radiation Transducers.
Thermal Transducers.
Magnetic & Electromagnetic Transducers.
Chemical & Biological Transducers.
Microfluidic Devices.