Wijesundara M.B.J., Azevedo R.G. Silicon Carbide microsystems for harsh environments

249 pp.
Springer Science+Business Media, LLC 2011
This book is intended for the practicing microelectromechanical sensor designer as well as engineers and engineering managers in other fields. This book provides an introduction to harsh environment sensor applications and silicon carbide microelectronics and microelectromechanical system technology for such applications. Namely, this book reviews why silicon carbide is an excellent match for producing harsh environment microsystems, how silicon carbide substrates and films are produced and patterned, review progress towards silicon carbide microelectronics and microelectromechanical sensors, and how electronics and microsensors can be integrated and packaged. Various approaches to communication and power are also discussed. It is hoped that by providing a review of the pieces of silicon carbide microsystem technology currently available and outlining additional innovations needed to produce reliable harsh environment microsystems, new research will address these challenges and the full benefit of silicon carbide microsystems will be realized.